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Full name Familienname, Vorname
Roediger, P.
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Roediger, P. ; Wanzenboeck, H. D. ; Hochleitner, G. ; Bertagnolli, E. ; Buehler, W. Focused electron beam induced etching of silicon by chlorine gas: Negative effects of residual gas contamination on the etching processArtikel Article 2010
2Wanzenboeck, H. D. ; Roediger, P. ; Hochleitner, G. ; Bertagnolli, E. ; Buehler, W. Novel method for cleaning a vacuum chamber from hydrocarbon contaminationArtikel Article 2010