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Kögler, R.
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Kögler, R. ; Mücklich, A ; Kaschny, J. ; Reuther, H ; Eichhorn, F ; Hutter, Herbert ; Skorupa, W. Defect engineering in ion beam synthesis of SiC and SiO2 in SiArtikel Article2005
2Krecar, Dragan ; Fuchs, Michael ; Kögler, R. ; Hutter, Herbert Investigation of gettering effects in CZ-type silicon with SIMSArtikel Article 2005
3Gammer, Katharina ; Gritsch, Martin ; Peeva, A. ; Kögler, R. ; Hutter, Herbert Characterization of carbon-boronnitride-coatings prepared with chemical vapor deposition by auger electron spectroscopy, electron probe microanalysis and secondary ion mass spectrometryArtikel Article2002