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Van Aeken, K.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Horkel, Maximilian ; Van Aeken, K. ; Eisenmenger-Sittner, Christoph ; Depla, D. ; Mahieu, S. ; Leroy, W.P.	Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition	Artikel Article	5-Feb-2010