Record link: 
http://hdl.handle.net/20.500.12708/167713
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Title: 
Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
en
Citation: 
Horkel, M., Van Aeken, K., Eisenmenger-Sittner, C., Depla, D., Mahieu, S., & Leroy, W. P. (2010). Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition. Journal of Physics D: Applied Physics, 43(7), 075302. https://doi.org/10.1088/0022-3727/43/7/075302
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Publisher DOI: 
10.1088/0022-3727/43/7/075302
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Publication Type: 
Article - Original Research Article
en
Language: 
English
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Authors: 
Horkel, Maximilian 
Van Aeken, K. 
Eisenmenger-Sittner, Christoph 
Depla, D. 
Mahieu, S. 
Leroy, W.P. 
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Organisational Unit: 
E138-03 - Forschungsbereich Functional and Magnetic Materials 
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Journal: 
Journal of Physics D: Applied Physics 
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ISSN: 
0022-3727
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Date (published): 
5-Feb-2010
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Number of Pages: 
7
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Publisher: 
IOP PUBLISHING LTD
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Peer reviewed: 
Yes
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Keywords: 
Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Acoustics and Ultrasonics; Surfaces, Coatings and Films
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Research Areas: 
Non-metallic Materials: 25%
Materials Characterization: 25%
Quantum Many-Body Systems: 50%
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Science Branch: 
Physik, Mechanik, Astronomie
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Appears in Collections:
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