<div class="csl-bib-body">
<div class="csl-entry">Horkel, M., Van Aeken, K., Eisenmenger-Sittner, C., Depla, D., Mahieu, S., & Leroy, W. P. (2010). Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition. <i>Journal of Physics D: Applied Physics</i>, <i>43</i>(7), 075302. https://doi.org/10.1088/0022-3727/43/7/075302</div>
</div>
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0022-3727
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http://hdl.handle.net/20.500.12708/167713
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dc.language.iso
en
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dc.publisher
IOP PUBLISHING LTD
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dc.relation.ispartof
Journal of Physics D: Applied Physics
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dc.subject
Condensed Matter Physics
-
dc.subject
Electronic, Optical and Magnetic Materials
-
dc.subject
Acoustics and Ultrasonics
-
dc.subject
Surfaces, Coatings and Films
-
dc.title
Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
en
dc.type
Artikel
de
dc.type
Article
en
dc.description.startpage
075302
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Original Research Article
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43
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7
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M4
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M2
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Q6
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Non-metallic Materials
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Materials Characterization
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Quantum Many-Body Systems
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25
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25
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50
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dcterms.isPartOf.title
Journal of Physics D: Applied Physics
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tuw.publication.orgunit
E138-03 - Forschungsbereich Functional and Magnetic Materials
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tuw.publisher.doi
10.1088/0022-3727/43/7/075302
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1361-6463
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7
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Physik, Mechanik, Astronomie
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Physik der Materie
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Physics of Matter
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E130
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E138 - Institut für Festkörperphysik
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E138-03 - Forschungsbereich Functional and Magnetic Materials
