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Li, Junjie
Network Lab
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Li, Junjie
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Chinese Academy of Sciences
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Chen, Rui
2
Filipovic, Lado
2
Hu, Ziyi
2
Li, Junjie
2
Li, Ling
2
Wei, Yayi
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Reiter, Tobias
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Shang, Dashan
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Shao, Hua
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Wang, Zhongrui
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Subject
1
GAAFET
1
gas diffusion
1
gate-all-around (GAA)
1
inner‐spacer
1
isotropic etching
1
loading effect
1
non‐uniform etching profile
1
process TCAD simulation
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SiGe selective etching
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silicon germanium
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2000 - 2025
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1
Hu, Ziyi
; Li, Junjie
; Chen, Rui
; Shang, Dashan
; Wei, Yayi
; Wang, Zhongrui
; Li, Ling
; Filipovic, Lado
A Two-Step Dry Etching Model for Non-Uniform Etching Profile in Gate-All-Around Field-Effect Transistor Manufacturing
Article
Artikel
19-Dec-2024
2
Shao, Hua
; Reiter, Tobias
; Chen, Rui
; Li, Junjie
; Hu, Ziyi
; Wei, Yayi
; Li, Ling
; Filipovic, Lado
Loading Effect during SiGe/Si Stack Selective Isotropic Etching for Gate-All-Around Transistors
Article
Artikel
26-Nov-2024
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