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Full name Familienname, Vorname
Keerthi, Keerthi
 
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1Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILMPresentation VortragSep-2024