Record link: 
http://hdl.handle.net/20.500.12708/208778
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Title: 
IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM
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Citation: 
Keerthi, K., Schmid, U., & Schneider, M. (2024, September). IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM [Conference Presentation]. MNE 2024 - 50th International Micro and Nano Engineering Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208778
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Publication Type: 
Presentation - Conference Presentation
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Language: 
English
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Authors: 
Keerthi, Keerthi 
Schmid, Ulrich 
Schneider, Michael 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
Sep-2024
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Event name: 
MNE 2024 - 50th International Micro and Nano Engineering Conference 
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Event date: 
16-Sep-2024 - 19-Sep-2024
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Event place: 
Montpellier, France
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Keywords: 
AlN; thin films; dual Ion beam; sputtered; impact; substrat tilt
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Research Areas: 
Materials Characterization: 50%
Modeling and Simulation: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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