MNE 2024 - 50th International Micro and Nano Engineering Conference

Event name
MNE 2024 - 50th International Micro and Nano Engineering Conference
 
Event type
Event for scientific audience
 
Start date
16-09-2024
End date
19-09-2024
 
Location
Montpellier
Country
France
 
Conference Track
Single Track
Event format Veranstaltungsformat
On Site

Publications Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILMPresentation VortragSep-2024