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| | Preview | Author(s) | Title | Type | Issue Date |
| 1 | | Loesener, Martin E.M. ; Zinsler, Tobias Ewald ; Stampfer, Bernhard ; Wimmer, Florian ; Ioannidis , Eleftherios ; Pflanzl, Walter ; Minixhofer, Rainer ; Grasser, Tibor ; Waltl, Michael | Evaluation of the robustness of the defect-centric model for defect parameter extraction from RTN and BTI analysis using Comphy | Article Artikel  | 1-Mar-2026 |
| 2 |  | Huber, Dominik ; Gesing, Andre ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich | Design-dependent Q-factor spectroscopy: Impact of surface oxidation on dissipation in 2 micrometer thick MEMS resonators | Article Artikel   | 1-Mar-2026 |
| 3 |  | Huber, D. ; Stöger-Pollach, M. ; Gülly, M. ; Schallert, C. ; Steinmüller-Nethl, D. ; Pfusterschmied, G. ; Schmid, U. | Quality factor enhancement in polycrystalline diamond MEMS resonators by post-deposition plasma treatment | Article Artikel | 28-Jan-2026 |
| 4 |  | Huber, Dominik ; Schallert, Christoph ; Loch Gesing, André ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich | Automated contactless characterization of local thin film thickness and film stress with standard MEMS structures at wafer level | Article Artikel | 8-Jan-2026 |
| 5 |  | Disnan, Davide ; Schneider, Michael ; Zhang, Xinxin ; Qian, Kunpeng ; Bacher, Fabian ; Zhao, Yin ; Feng, Xin ; Schmid, Ulrich | P(VDF-TrFE) nanocomposite thin films with cellulose nanofibers and dopamine-modified BaTiO₃ nanoparticles for enhanced energy storage | Article Artikel | 31-Dec-2025 |
| 6 | | Platz, Daniel ; Fabian, Johannes ; Schmid, Ulrich | The interplay of pre-stress and higher-order basis functions in Galerkin-based postbuckling analysis of a von Karman plate | Article Artikel | Dec-2025 |
| 7 | | Dubek, Krisztián ; Schneidhofer, Christoph ; Dörr, Nicole ; Rojacz, Harald ; Plank, Bernhard ; Schmid, Ulrich | Accelerated lifetime estimation and failure analysis of micromachined humidity sensors under high temperature and high humidity conditions | Article Artikel | Nov-2025 |
| 8 | | Schneider, Michael ; Mortada, Mahdi ; Mayrhofer, Dominik ; Kaltenbacher, Manfred ; Schmid, Ulrich | Local pressure field distribution of bistable PMUTs for distance sensing | Article Artikel | 21-Oct-2025 |
| 9 | | Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Gruber, Jakob ; Platz, Daniel ; Schmid, Ulrich | Multimodal electromechanics with niobium vacuum gap capacitor membranes | Article Artikel | 16-Oct-2025 |
| 10 | | Moll, Philipp ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich | Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply deposition | Article Artikel | Oct-2025 |
| 11 | | Raad, Ryan ; Sauer, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | XPS Investigation of Argon Monoatomic and Gas Cluster Ion Beam Etching of 4H SiC | Presentation Vortrag | 24-Sep-2025 |
| 12 | | Ignat, Ioan ; Platz, Daniel ; Schmid, Ulrich | High Aspect Ratio, Superconducting Vacuum Gap Capacitor NEMS with Plate Distances Down to 32 nm | Article Artikel | 18-Sep-2025 |
| 13 | | Yang, Tingqiang ; Perazzi, Marco ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich | DFT Calculations on the Termination of 4H-SiC Non-Polar Surfaces during Photoelectrochemical Pore Formation | Inproceedings Konferenzbeitrag | Sep-2025 |
| 14 | | Mortada, Mahdi ; Schlögl, Matthias ; Schmid, Ulrich ; Schneider, Michael | Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration | Inproceedings Konferenzbeitrag | Sep-2025 |
| 15 | | Huber, Dominik ; Gülly, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich | Capacitive Excitation of Out-of-Plane Modes in MEMS Resonators with a Planar Electrode Design | Inproceedings Konferenzbeitrag | Sep-2025 |
| 16 | | Gesing, André L. ; Platz, Daniel ; Schmid, Ulrich | On the 3D Stokes flow around non-slender MEMS resonators | Article Artikel | 30-Aug-2025 |
| 17 | | Mortada, Mahdi ; Das, Proloy Taran ; Schmid, Ulrich ; Schneider, Michael | High-resolution parametric characterization of snap-through behaviour in bistable PiezoMEMS membranes | Article Artikel | 1-Aug-2025 |
| 18 | | Moll, Philipp ; Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael | Thermal Stress Tuning of Bistable Piezoelectric MEMS Membranes to Maximize Dynamic Deflections Towards Highest Switching Probability | Inproceedings Konferenzbeitrag | Jun-2025 |
| 19 |  | Huber, Dominik ; Schneider, Michael ; Fulmek, Paul ; Pfusterschmied, Georg ; Schmid, Ulrich | Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer level | Article Artikel | 27-May-2025 |
| 20 | | Pfusterschmied, Georg ; Zellner, Christopher ; Schock, Dominik ; Schmid, Ulrich | Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS | Inproceedings Konferenzbeitrag | May-2025 |
| 21 | | Huber, Dominik ; Schallert, Christoph Anton ; Pfusterschmied, Georg ; Schmid, Ulrich | Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS Structures | Inproceedings Konferenzbeitrag | May-2025 |
| 22 | | Engr. Muzammil Gilani ; Zarepakzad, Sina ; Basit Ali ; Mehrdad Karimzadehkhouei ; Alaca, B. Erdem | MEMS Platforms for Automated and High-Throughput Micromechanical Testing of Silicon Nanowires | Inproceedings Konferenzbeitrag | May-2025 |
| 23 | | Zarepakzad, Sina ; Thorat, Saurabh ; Egger, Patrick ; Schmid, Ulrich ; Schneider, Michael | Machine Learning-Driven High-Throughput Analysis of Damping Effects in Silicon-Based Cantilever Resonators with Metallic Coating | Inproceedings Konferenzbeitrag | May-2025 |
| 24 | | Zarepakzad, Sina ; Egger, Patrick ; Rahnemaihaghighi, Negin ; Muringakodan, Shareena ; Mortada, Mahdi ; Das, Proloy Taran ; Schwab, Keith ; Schmid, Ulrich ; Schneider, Michael | Noise in Piezoelectric MEMS: Modeling and Experimental Characterization | Inproceedings Konferenzbeitrag | May-2025 |
| 25 | | Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael | DC Voltage Induced Parametric Potential Energy Modulation in Bistable Piezoelectric MEMS Membranes | Inproceedings Konferenzbeitrag | May-2025 |
| 26 | | Loch Gesing, Andre ; Gietl, Erwin ; Stixenberger, M. ; Platz, Daniel ; Schmid, Ulrich | Avoided mode-crossing in MEMS resonators under different dissipation mechanisms | Inproceedings Konferenzbeitrag | May-2025 |
| 27 | | Berger, Claudio ; Schiek, Maximilian ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich | Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonators | Article Artikel | 14-Apr-2025 |
| 28 |  | Kwon, MinHee ; Schlögl, Matthias ; Platz, Daniel ; Schmid, Ulrich | GHz SAW strain sensors under high mechanical load conditions | Article Artikel | Mar-2025 |
| 29 | | Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Barbara ; Schwarz, Sabine ; Artner, Werner ; Schmid, Ulrich | Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applications | Article Artikel | 1-Feb-2025 |
| 30 | | Huber, Dominik ; Jurekovic, Patricia ; Schallert, Christoph Anton ; Pfusterschmied, Georg ; Schmid, Ulrich | Impact of Nitrogen Doping on the Q-Factor of Polycrystalline 3C-SiC MEMS Resonators | Inproceedings Konferenzbeitrag | 2025 |
| 31 | | Moll, Philipp ; Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael | Temperature-Dependence of Static and Dynamic Deflection of Bistable Piezoelectric Mems Membranes | Inproceedings Konferenzbeitrag | 2025 |
| 32 | | Schneider, Michael ; Schmid, Ulrich | Pure and doped aluminum nitride - from material noise to bistable devices | Inproceedings Konferenzbeitrag | 2025 |
| 33 |  | Berger, Claudio ; Schiek, Maximilian ; Pandit, Shardul ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich | Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material | Article Artikel | 8-Oct-2024 |
| 34 |  | Pandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schmid, Ulrich | Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical coupling | Article Artikel | 1-Oct-2024 |
| 35 |  | Pompei, Emanuele ; Vlamidis, Ylea ; Ferbel, Letizia ; Zannier, Valentina ; Rubini, Silvia ; Esteban, Daniel Arenas ; Bals, Sara ; Marinelli, Carmela ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan ; Veronesi, Stefano | Functionalization of three-dimensional epitaxial graphene with metal nanoparticles | Article Artikel | 14-Sep-2024 |
| 36 | | Yang, Tingqiang ; Perazzi, Marco ; Leitgeb, Markus ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich | K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation | Presentation Vortrag | Sep-2024 |
| 37 | | Mortada, Mahdi ; Schmid, Ulrich ; Schneider, Michael | K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and Vacuum | Presentation Vortrag | Sep-2024 |
| 38 | | Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael | STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES | Presentation Vortrag | Sep-2024 |
| 39 | | Rahnemaihaghighi, Negin ; Schmid, Ulrich ; Schneider, Michael | LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMS | Presentation Vortrag | Sep-2024 |
| 40 | | Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael | IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM | Presentation Vortrag | Sep-2024 |
| 41 |  | Wahid, Shan Nizam ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer | Article Artikel | 21-Aug-2024 |
| 42 | | Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Kerimzade, Umut ; Alaca, B. Erdem ; Alaka, B. Erdem | Design Optimization of MEMS Stage for Pure Bending of Si Nanowires | Inproceedings Konferenzbeitrag | Aug-2024 |
| 43 | | Bostan Shirin, Mehdi ; Ali, Basit ; Nacarküçük, Ege ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Design and Fabrication of Low-g Piezoresistive Accelerometer Utilizing Silicon Nanowire | Inproceedings Konferenzbeitrag | Aug-2024 |
| 44 | | Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Bostan Shirin, Mehdi ; Kerimzade, Umut ; Alaca, B. Erdem | Investigating Stress-Induced Change in Resonant Frequency of Silicon Nanowires | Inproceedings Konferenzbeitrag | Aug-2024 |
| 45 | | Ali, Basit ; Muzammil, Muhammad ; Bostan Shirin, Mehdi ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical Systems | Inproceedings Konferenzbeitrag | Aug-2024 |
| 46 | | Gesing, André L. ; Huber, Dominik ; Steinmüller-Neth, Doris ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich | Modeling polycrystalline diamond MEMS resonators | Inproceedings Konferenzbeitrag | 25-Jun-2024 |
| 47 | | Platz, Daniel ; Loch Gesing, Andre ; Schmid, Ulrich | Modelling the Interaction of Non-Slender MEMS Resonators with Fluidic and Elastic Environments | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
| 48 | | Schneider, Michael ; Schmid, Ulrich | How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonators | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
| 49 | | Zarepakzad, Sina ; Esfahani, Mohammad Nasr ; Tasdemir, Dr. Zuhal ; Schneider, Michael ; Schmid, Ulrich ; Leblebici, Yusuf ; Alaca, B. Erdem | Transverse Vibration of Silicon Nanowires: Surface Properties | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
| 50 | | Schneider, Michael ; Schmid, Ulrich | Material Aspects and Unconventional Device Concepts for PiezoMEMS | Presentation Vortrag | 7-Jun-2024 |
| 51 | | Huber, Dominik ; Platz, Daniel ; Loch Gesing, Andre ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich | Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators | Presentation Vortrag | Jun-2024 |
| 52 | | Wahid, Shan ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling | Presentation Vortrag | Jun-2024 |
| 53 | | Platz, Daniel ; Stixenberger, M. ; Loch Gesing, Andre ; Ignat, Ioan ; Kähler, Hendrik ; Schmid, Ulrich | Anchor Losses in MEMS Plate Resonators of Finite Width | Presentation Vortrag | Jun-2024 |
| 54 | | Ermilova, Ekaterina ; Klapetek, Petr ; Pfusterschmied, Georg ; Nanjappan, Chezhiyan ; Schmid, Ulrich ; Hertwig, Andreas | On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics | Presentation Vortrag | 29-May-2024 |
| 55 |  | Moll, Philipp ; Schwarz, Sabine ; Pfusterschmied, Georg ; Artner, Werner ; Schmid, Ulrich | Polycrystalline Lpcvd 3c-Sic Thin Films on Sio2 Using Alternating Supply Deposition | Article Artikel | 24-May-2024 |
| 56 |  | Berger, Claudio ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, U | Plasma-enhanced chemical vapor deposition a-SiOCN:H low-Z thin films for bulk acoustic wave resonators | Article Artikel | 24-Apr-2024 |
| 57 |  | Moll, Philipp ; Pfusterschmied, Georg ; Schwarz, Sabine ; Stöger-Pollach, Michael ; Schmid, Ulrich | Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si | Article Artikel | 18-Apr-2024 |
| 58 |  | Schlögl, Matthias ; Schneider, Michael ; Schmid, Ulrich | Scalable electromagnetic energy harvester for wind turbine rotor blade applications | Article Artikel | 18-Apr-2024 |
| 59 |  | Alasatri, Suresh ; Schneider, Michael ; Mirwald, Johannes ; Hofko, Bernhard ; Schmid, Ulrich | Real-Time Tracking of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Resonators | Article Artikel | 12-Apr-2024 |
| 60 |  | Disnan, Davide ; Bacher, Fabian ; Berger, Stephan Christian ; Schneider, Michael ; Schmid, Ulrich | Microstructural influence on thermal stability of ferroelectric properties in P(VDF-TrFE) spin cast thin films | Article Artikel | 9-Apr-2024 |
| 61 | | Castañeda, Armando ; Ditmarsch, Hans van ; Kuznets, Roman ; Moses, Yoram ; Schmid, Ulrich | Epistemic and Topological Reasoning in Distributed Systems | Article Artikel | 8-Mar-2024 |
| 62 | | Huber, Dominik ; Platz, Daniel ; Gesing, André L. ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich | Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators | Inproceedings Konferenzbeitrag | 22-Feb-2024 |
| 63 |  | Xiang, Yijie ; Fulmek, Paul ; Sauer, Markus ; Foelske, Annette ; Schmid, Ulrich | Characterization of Surface Modifications in Oxygen Plasma-Treated Teflon AF1600 | Article Artikel | 21-Feb-2024 |
| 64 |  | Dubek, Krisztián ; Schneidhofer, Christoph ; Dörr, Nicole ; Schmid, Ulrich | Laboratory robustness validation of a humidity sensor system for the condition monitoring of grease-lubricated components for railway applications | Article Artikel | 14-Feb-2024 |
| 65 | | Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich | Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply Deposition | Inproceedings Konferenzbeitrag | Feb-2024 |
| 66 | | Parmar, Priyank Mehulbhai ; Leitgeb, Markus ; Yadav, Manoj Kumar ; Zellner, Christopher ; Wedl, Günter ; Pfusterschmied, Georg ; Schmid, Ulrich | High-temperature adhesive bonding of 4H-SiC substrates | Presentation Vortrag | 2024 |
| 67 |  | Perazzi, Marco ; Leitgeb, Markus ; Vengattoor Raghu, Appu ; Zellner, Christopher ; Hahn, Rainer ; Kirnbauer, Alexander ; Schwarz, Sabine ; Pfusterschmied, Georg ; Schmid, Ulrich | High-Temperature Reorganization Behavior of Single-Crystalline Porous 4H-SiC Thin Foils | Article Artikel | 2024 |
| 68 | | Schneider, Michael ; Mortada, Mahdi ; Mayrhofer, Dominik ; Kaltenbacher, Manfred ; Schmid, Ulrich | Directivity and distance dependence of generated pressure field of bistable PMUTs | Inproceedings Konferenzbeitrag | 2024 |
| 69 | | Kwon, MinHee ; Schlögl, Matthias ; Platz, D. ; Schmid, Ulrich | OT4.72 - Design Considerations for GHz SAW Resonators in High Strain Sensing | Inproceedings Konferenzbeitrag | 2024 |
| 70 | | Ali, Basit ; Bostan Shirin, Mehdi ; Muzammil, Muhammad ; Nacarkucuk, Ege ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Towards Fabrication of Next-Generation Physical Sensors Through Integrating Suspended Sub-Micron Silicon Nanowires with Microelectromechanical Systems | Inproceedings Konferenzbeitrag | 2024 |
| 71 | | Veronesi, Stefano ; Vlamidis, Ylea ; Ferbel, Letizia ; Marinelli, Carmela ; Sanmartin, Chiara ; Taglieri, Isabella ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Mencarelli, Fabio ; Heun, Stefan | Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications | Article Artikel | 10-Nov-2023 |
| 72 | | Kwon, MinHee ; Ignat, Ioan ; Platz, Daniel ; Arthaber, Holger ; Schmid, Ulrich | Aluminum nitride surface acoustic wave resonators with high Qf product by optical lithography | Article Artikel | 1-Nov-2023 |
| 73 | | Pandit, Shardul ; Schneider, Michael ; Schwarz, Sabine ; Schmid, Ulrich | Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (YₓAl₁₋ₓN) Thin Films | Article Artikel | Nov-2023 |
| 74 | | Schneider, Michael ; Schmid, Ulrich | Impact of bandwidth and number of measurement points on Q-factor measurement precision in piezoelectric MEMS resonators | Inproceedings Konferenzbeitrag | Oct-2023 |
| 75 | | Alasatri, Suresh ; Schneider, Michael ; Mirwald, Johannes ; Hofko, Bernhard ; Schmid, Ulrich | Continuous Monitoring of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Sensors | Inproceedings Konferenzbeitrag | Oct-2023 |
| 76 | | Loch Gesing, Andre ; Tran, Thomas ; Platz, Daniel ; Schmid, Ulrich | Efficiently modelling the fluid-structure interaction of micro-plate- resonators with viscous fluids using modal basis functions | Inproceedings Konferenzbeitrag | Oct-2023 |
| 77 | | Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Haviland, David ; Platz, Daniel ; Schmid, Ulrich | Nanosized Vacuum Gap Electromechanical Devices with Integrated Piezoelectric Actuator | Inproceedings Konferenzbeitrag | Oct-2023 |
| 78 | | David, Mauro ; Disnan, Davide ; Arigliani, Elena ; Lardschneider, Anna ; Marschick, Georg ; Hoang, Hanh T. ; Detz, Hermann ; Lendl, Bernhard ; Schmid, Ulrich ; Strasser, Gottfried ; Hinkov, Borislav | Advanced mid-infrared plasmonic waveguides for on-chip integrated photonics | Article Artikel | 27-Sep-2023 |
| 79 | | Wahid, Shan ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer | Presentation Vortrag | 21-Sep-2023 |
| 80 | | Alasatri, Suresh ; Schneider, Michael ; Mirwald, Johannes ; Hofko, Bernhard ; Schmid, Ulrich | Real-time tracking of the dynamic viscosity of bitumen with piezoelectric MEMS resonators | Presentation Vortrag | 13-Sep-2023 |
| 81 | | Veronesi, Stefano ; Aureliano, Aureliano Macili ; Vlamidis, Ylea ; POMPEI, Emanuele ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan | Hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications | Presentation Vortrag | 4-Sep-2023 |
| 82 | | Perazzi, Marco ; Leitgeb, Markus ; Pfusterschmied, Georg ; Vengattoor Raghu, Appu ; Schmid, Ulrich ; Zellner, Christopher ; Schwarz, Sabine ; Hahn, Rainer ; Kirnbauer, Alexander | High-temperature Reorganization Behavior of Porous 4H-SiC Thin Foils | Presentation Vortrag | Sep-2023 |
| 83 | | Hinkov, Borislav ; David, Mauro ; Pilat, Florian ; Schwaighofer, Andreas ; Marschick, Georg ; Arigliani, Elena ; Souza, Patricia Lustoza ; Doganlar Ismail C. ; Gsodam, Xaver ; Dabrowska, Alicja ; Wacht, Dominik ; Sistani, Masiar ; Nazzari, Daniele ; Disnan, Davide ; Detz, Hermann ; Andrews, Aaron M. ; Schmid, Ulrich ; Weber, Walter M. ; Schwarz, Benedikt ; Lendl, Bernhard ; Strasser, Gottfried | On-chip liquid sensing using mid-IR plasmonics | Inproceedings Konferenzbeitrag | 2-Aug-2023 |
| 84 | | Arigliani, Elena ; David, Mauro ; Lardschneider, Anna ; Disnan, Davide ; Marschick, Georg ; Hoang, Hanh Thi ; Wacht, Dominik ; Ramer, Georg ; Detz, Hermann ; Schmid, Ulrich ; Lendl, Bernhard ; Strasser, Gottfried ; Schwarz, Benedikt ; Hinkov, Borislav | Polyethylene-loaded plasmonic waveguides for mid-IR photonic integrated circuits | Presentation Vortrag | 24-Jul-2023 |
| 85 | | Arigliani, Elena ; David, Mauro ; Lardschneider, Anna ; Disnan, Davide ; Marschick, Georg ; Hoang, Hanh Thi ; Wacht, Dominik ; Ramer, Georg ; Detz, Hermann ; Lendl, Bernhard ; Schmid, Ulrich ; Strasser, Gottfried ; Schwarz, Benedikt ; Hinkov, Borislav | Low loss polyethylene-loaded plasmonic waveguides for mid-infrared photonic integrated circuits | Presentation Vortrag | 20-Jul-2023 |
| 86 | | Platz, Daniel ; Loch Gesing, Andre ; Ignat, Ioan ; Demattio, David ; Schmid, Ulrich | Non-slender MEMS resonators for advanced AFM applications | Inproceedings Konferenzbeitrag | Jun-2023 |
| 87 | | Hafner, Jonas ; Disnan, Davide ; Benaglia, Simone ; Garcia, Ricardo ; Schmid, Ulrich | Solution-processed ferroelectric polymer nanocrystals | Article Artikel | Jun-2023 |
| 88 | | Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Haviland, David B ; Platz, Daniel ; Schmid, Ulrich | Vacuum gap electromechanical devices with integrated piezoelectric actuator | Inproceedings Konferenzbeitrag | Jun-2023 |
| 89 |  | Xiang, Yijie ; Dejkoski, Bozhidar ; Fulmek, Paul ; Schmid, Ulrich | Surface properties of μm and sub-μm polydimethylsiloxane thin films after oxygen plasma treatment | Article Artikel | 9-May-2023 |
| 90 | | Platz, Daniel | Essentials of Finite Element Simulations for MEMS | Presentation Vortrag | 8-May-2023 |
| 91 | | Nanjappan, Chezhiyan ; Pfusterschmied, Georg ; Schmid, Ulrich | Electrical Characterization of the SiO₂/4H-SiC Interface | Inproceedings Konferenzbeitrag | May-2023 |
| 92 | | Platz, Daniel ; Loch Gesing, Andre ; Schmid, Ulrich | Fluid-Structure Interaction of MEMS Resonators | Inproceedings Konferenzbeitrag | May-2023 |
| 93 | | Dubek, Krisztian ; Schneidhofer, Christoph ; Dörr, Nicole ; Schmid, Ulrich | Robust Sensor System for Condition Monitoring of Lubricated Rail Vehicle Components | Inproceedings Konferenzbeitrag | May-2023 |
| 94 | | Platz, Daniel ; Stixenberger, Marco ; Loch Gesing, Andre ; Ignat, Ioan ; Kähler, Hendrik ; Schmid, Ulrich | Quality Factor Modulation in MEMS Resonators by Elastic Wave Interference in the Anchor Region | Inproceedings Konferenzbeitrag | 4-Apr-2023 |
| 95 |  | Schlögl, Matthias ; Weißenbach, Josef ; Schneider, Michael ; Schmid, Ulrich | Stress engineering of polycrystalline aluminum nitride thin films for strain sensing with resonant piezoelectric microbridges | Article Artikel | 1-Jan-2023 |
| 96 | | Ullmann, Paul ; Bretthauer Christian ; Schneider, Michael ; Schmid, Ulrich | Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out | Article Artikel | 1-Jan-2023 |
| 97 | | Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich | Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMS | Inproceedings Konferenzbeitrag | Jan-2023 |
| 98 | | Schneider, Michael ; Kößl, Bernhard ; Alasatri, Suresh ; Magnet, Ingrid Anna Maria ; Schmid, Ulrich | Scalable Modular Measurement System For Continuous Blood Monitoring With Piezoelectric Mems Resonators | Inproceedings Konferenzbeitrag | Jan-2023 |
| 99 | | Platz, Daniel ; Fabian, Johannes ; Samm, Elisabeth ; Mortada, Mahdi ; Schneider, Michael ; Schmid, Ulrich | Exploiting Parametric Instability in Bistable MEMS Actuators | Inproceedings Konferenzbeitrag | Jan-2023 |
| 100 | | Schneidhofer, Christoph ; Dubek, Krisztian ; Dörr, Nicole | Robust sensors enabling condition-based maintenance of lubricated components in locomotives and wagons | Article Artikel | 2023 |
