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| | Preview | Author(s) | Title | Type | Issue Date |
| 1 | | Moll, Philipp ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich | Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply deposition | Article Artikel  | Oct-2025 |
| 2 | | Pfusterschmied, Georg ; Zellner, Christopher ; Schock, Dominik ; Schmid, Ulrich | Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS | Inproceedings Konferenzbeitrag | May-2025 |
| 3 | | Huber, Dominik ; Schallert, Christoph Anton ; Pfusterschmied, Georg ; Schmid, Ulrich | Simultaneous Analysis of Local Device Layer Thickness and Film Stress on Cantilevered MEMS Structures | Inproceedings Konferenzbeitrag | May-2025 |
| 4 | | Berger, Claudio ; Schiek, Maximilian ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich | Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonators | Article Artikel | 14-Apr-2025 |
| 5 | | Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Barbara ; Schwarz, Sabine ; Artner, Werner ; Schmid, Ulrich | Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applications | Article Artikel | 1-Feb-2025 |
| 6 |  | Berger, Claudio ; Schiek, Maximilian ; Pandit, Shardul ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich | Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material | Article Artikel   | 8-Oct-2024 |
| 7 |  | Pandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schmid, Ulrich | Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical coupling | Article Artikel | 1-Oct-2024 |
| 8 |  | Pompei, Emanuele ; Vlamidis, Ylea ; Ferbel, Letizia ; Zannier, Valentina ; Rubini, Silvia ; Esteban, Daniel Arenas ; Bals, Sara ; Marinelli, Carmela ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan ; Veronesi, Stefano | Functionalization of three-dimensional epitaxial graphene with metal nanoparticles | Article Artikel | 14-Sep-2024 |
| 9 | | Yang, Tingqiang ; Perazzi, Marco ; Leitgeb, Markus ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich | K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation | Presentation Vortrag | Sep-2024 |
| 10 | | Mortada, Mahdi ; Schmid, Ulrich ; Schneider, Michael | K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and Vacuum | Presentation Vortrag | Sep-2024 |
| 11 | | Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael | STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES | Presentation Vortrag | Sep-2024 |
| 12 | | Rahnemaihaghighi, Negin ; Schmid, Ulrich ; Schneider, Michael | LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMS | Presentation Vortrag | Sep-2024 |
| 13 | | Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael | IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM | Presentation Vortrag | Sep-2024 |
| 14 |  | Wahid, Shan Nizam ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer | Article Artikel | 21-Aug-2024 |
| 15 | | Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Kerimzade, Umut ; Alaca, B. Erdem ; Alaka, B. Erdem | Design Optimization of MEMS Stage for Pure Bending of Si Nanowires | Inproceedings Konferenzbeitrag | Aug-2024 |
| 16 | | Ali, Basit ; Muzammil, Muhammad ; Bostan Shirin, Mehdi ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical Systems | Inproceedings Konferenzbeitrag | Aug-2024 |
| 17 | | Bostan Shirin, Mehdi ; Ali, Basit ; Nacarküçük, Ege ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Design and Fabrication of Low-g Piezoresistive Accelerometer Utilizing Silicon Nanowire | Inproceedings Konferenzbeitrag | Aug-2024 |
| 18 | | Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Bostan Shirin, Mehdi ; Kerimzade, Umut ; Alaca, B. Erdem | Investigating Stress-Induced Change in Resonant Frequency of Silicon Nanowires | Inproceedings Konferenzbeitrag | Aug-2024 |
| 19 | | Gesing, André L. ; Huber, Dominik ; Steinmüller-Neth, Doris ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich | Modeling polycrystalline diamond MEMS resonators | Inproceedings Konferenzbeitrag | 25-Jun-2024 |
| 20 | | Platz, Daniel ; Loch Gesing, Andre ; Schmid, Ulrich | Modelling the Interaction of Non-Slender MEMS Resonators with Fluidic and Elastic Environments | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
