| | Preview | Author(s) | Title | Type | Issue Date |
| 1 |  | Berger, Claudio ; Schiek, Maximilian ; Pandit, Shardul ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich | Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z material | Article Artikel  | 8-Oct-2024 |
| 2 |  | Pandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schmid, Ulrich | Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical coupling | Article Artikel  | 1-Oct-2024 |
| 3 |  | Pompei, Emanuele ; Vlamidis, Ylea ; Ferbel, Letizia ; Zannier, Valentina ; Rubini, Silvia ; Esteban, Daniel Arenas ; Bals, Sara ; Marinelli, Carmela ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan ; Veronesi, Stefano | Functionalization of three-dimensional epitaxial graphene with metal nanoparticles | Article Artikel  | 14-Sep-2024 |
| 4 | | Yang, Tingqiang ; Perazzi, Marco ; Leitgeb, Markus ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich | K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formation | Presentation Vortrag | Sep-2024 |
| 5 | | Mortada, Mahdi ; Schmid, Ulrich ; Schneider, Michael | K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and Vacuum | Presentation Vortrag | Sep-2024 |
| 6 | | Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael | STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES | Presentation Vortrag | Sep-2024 |
| 7 | | Rahnemaihaghighi, Negin ; Schmid, Ulrich ; Schneider, Michael | LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMS | Presentation Vortrag | Sep-2024 |
| 8 | | Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael | IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM | Presentation Vortrag | Sep-2024 |
| 9 |  | Wahid, Shan Nizam ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer | Article Artikel  | 21-Aug-2024 |
| 10 | | Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Kerimzade, Umut ; Alaca, B. Erdem ; Alaka, B. Erdem | Design Optimization of MEMS Stage for Pure Bending of Si Nanowires | Inproceedings Konferenzbeitrag  | Aug-2024 |
| 11 | | Ali, Basit ; Muzammil, Muhammad ; Bostan Shirin, Mehdi ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical Systems | Inproceedings Konferenzbeitrag  | Aug-2024 |
| 12 | | Bostan Shirin, Mehdi ; Ali, Basit ; Nacarküçük, Ege ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem | Design and Fabrication of Low-g Piezoresistive Accelerometer Utilizing Silicon Nanowire | Inproceedings Konferenzbeitrag  | Aug-2024 |
| 13 | | Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Bostan Shirin, Mehdi ; Kerimzade, Umut ; Alaca, B. Erdem | Investigating Stress-Induced Change in Resonant Frequency of Silicon Nanowires | Inproceedings Konferenzbeitrag  | Aug-2024 |
| 14 | | Gesing, André L. ; Huber, Dominik ; Steinmüller-Neth, Doris ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich | Modeling polycrystalline diamond MEMS resonators | Inproceedings Konferenzbeitrag | 25-Jun-2024 |
| 15 | | Platz, Daniel ; Loch Gesing, Andre ; Schmid, Ulrich | Modelling the Interaction of Non-Slender MEMS Resonators with Fluidic and Elastic Environments | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
| 16 | | Schneider, Michael ; Schmid, Ulrich | How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonators | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
| 17 | | Zarepakzad, Sina ; Esfahani, Mohammad Nasr ; Tasdemir, Dr. Zuhal ; Schneider, Michael ; Schmid, Ulrich ; Leblebici, Yusuf ; Alaca, B. Erdem | Transverse Vibration of Silicon Nanowires: Surface Properties | Inproceedings Konferenzbeitrag | 24-Jun-2024 |
| 18 | | Schneider, Michael ; Schmid, Ulrich | Material Aspects and Unconventional Device Concepts for PiezoMEMS | Presentation Vortrag | 7-Jun-2024 |
| 19 | | Huber, Dominik ; Platz, Daniel ; Loch Gesing, Andre ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich | Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators | Presentation Vortrag | Jun-2024 |
| 20 | | Wahid, Shan ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich | A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling | Presentation Vortrag | Jun-2024 |