Forschungsbereich Mikrosystemtechnik

Organization Name (de) Name der Organisation (de)
E366-02 - Forschungsbereich Mikrosystemtechnik
 
Code Kennzahl
E366-02
 
Type of Organization Organisationstyp
Research Division
Parent OrgUnit Übergeordnete Organisation
 
Active Aktiv
 


Results 1-20 of 1735 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Berger-2024-Journal of Applied Physics-vor.pdf.jpgBerger, Claudio ; Schiek, Maximilian ; Pandit, Shardul ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Bulk acoustic wave—Solidly mounted resonator with a-SiOCN:H as low-Z materialArticle Artikel 8-Oct-2024
2Pandit-2024-SENSORS AND ACTUATORS A-PHYSICAL-vor.pdf.jpgPandit, Shardul ; Schneider, Michael ; Berger, Claudio ; Schmid, Ulrich Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y₀.₂Al₀.₈N) thin films for BAW resonators with high electromechanical couplingArticle Artikel 1-Oct-2024
3Pompei-2024-Nanoscale-vor.pdf.jpgPompei, Emanuele ; Vlamidis, Ylea ; Ferbel, Letizia ; Zannier, Valentina ; Rubini, Silvia ; Esteban, Daniel Arenas ; Bals, Sara ; Marinelli, Carmela ; Pfusterschmied, Georg ; Leitgeb, Markus ; Schmid, Ulrich ; Heun, Stefan ; Veronesi, Stefano Functionalization of three-dimensional epitaxial graphene with metal nanoparticlesArticle Artikel 14-Sep-2024
4Yang, Tingqiang ; Perazzi, Marco ; Leitgeb, Markus ; Zellner, Christopher ; Pfusterschmied, Georg ; Schmid, Ulrich K-3. DFT calculations on the surface termination of 4H-SiC {10-10} and {11-20} during photoelectrochemical pore formationPresentation VortragSep-2024
5Mortada, Mahdi ; Schmid, Ulrich ; Schneider, Michael K-4. Analysis of the Parametric Snap-through Behaviour of Bistable PiezoMEMS in Air and VacuumPresentation VortragSep-2024
6Muringakodan, Shareena ; Schmid, Ulrich ; Schneider, Michael STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANESPresentation VortragSep-2024
7Rahnemaihaghighi, Negin ; Schmid, Ulrich ; Schneider, Michael LOW-TEMPERATURE NOISE BEHAVIOR OF PIEZOELECTRIC ALN THIN FILMSPresentation VortragSep-2024
8Keerthi, Keerthi ; Schmid, Ulrich ; Schneider, Michael IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILMPresentation VortragSep-2024
9Wahid-2024-Materials Science Forum-vor.pdf.jpgWahid, Shan Nizam ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC WaferArticle Artikel 21-Aug-2024
10Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Kerimzade, Umut ; Alaca, B. Erdem ; Alaka, B. Erdem Design Optimization of MEMS Stage for Pure Bending of Si NanowiresInproceedings Konferenzbeitrag Aug-2024
11Ali, Basit ; Muzammil, Muhammad ; Bostan Shirin, Mehdi ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical SystemsInproceedings Konferenzbeitrag Aug-2024
12Bostan Shirin, Mehdi ; Ali, Basit ; Nacarküçük, Ege ; Zarepakzad, Sina ; Kerimzade, Umut ; Alaca, B. Erdem Design and Fabrication of Low-g Piezoresistive Accelerometer Utilizing Silicon NanowireInproceedings Konferenzbeitrag Aug-2024
13Muzammil, Muhammad ; Zarepakzad, Sina ; Ali, Basit ; Bostan Shirin, Mehdi ; Kerimzade, Umut ; Alaca, B. Erdem Investigating Stress-Induced Change in Resonant Frequency of Silicon NanowiresInproceedings Konferenzbeitrag Aug-2024
14Gesing, André L. ; Huber, Dominik ; Steinmüller-Neth, Doris ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich Modeling polycrystalline diamond MEMS resonatorsInproceedings Konferenzbeitrag25-Jun-2024
15Platz, Daniel ; Loch Gesing, Andre ; Schmid, Ulrich Modelling the Interaction of Non-Slender MEMS Resonators with Fluidic and Elastic EnvironmentsInproceedings Konferenzbeitrag24-Jun-2024
16Schneider, Michael ; Schmid, Ulrich How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonatorsInproceedings Konferenzbeitrag24-Jun-2024
17Zarepakzad, Sina ; Esfahani, Mohammad Nasr ; Tasdemir, Dr. Zuhal ; Schneider, Michael ; Schmid, Ulrich ; Leblebici, Yusuf ; Alaca, B. Erdem Transverse Vibration of Silicon Nanowires: Surface PropertiesInproceedings Konferenzbeitrag24-Jun-2024
18Schneider, Michael ; Schmid, Ulrich Material Aspects and Unconventional Device Concepts for PiezoMEMSPresentation Vortrag7-Jun-2024
19Huber, Dominik ; Platz, Daniel ; Loch Gesing, Andre ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS ResonatorsPresentation VortragJun-2024
20Wahid, Shan ; Leitgeb, Markus ; Pfusterschmied, Georg ; Schmid, Ulrich A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled SpallingPresentation VortragJun-2024