Record link: 
http://hdl.handle.net/20.500.12708/208948
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Title: 
Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators
en
Citation: 
Huber, D., Platz, D., Loch Gesing, A., Fulmek, P., Steinmüller-Nethl, D., Pfusterschmied, G., & Schmid, U. (2024, June). Grain Size Dependent Q-Factor in Polycrystalline Diamond MEMS Resonators [Poster Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208948
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Publication Type: 
Presentation - Poster Presentation
en
Language: 
English
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Authors: 
Huber, Dominik 
Platz, Daniel 
Loch Gesing, Andre 
Fulmek, Paul 
Steinmüller-Nethl, Doris 
Pfusterschmied, Georg 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
Jun-2024
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Event name: 
MESS24 - Microelectronic Systems Symposium 
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Event date: 
6-Jun-2024 - 7-Jun-2024
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Event place: 
Wien, Austria
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Keywords: 
Q-Factor; Polycrystalline; Diamond; Resonators; MEMS
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Research Areas: 
Materials Characterization: 50%
Modeling and Simulation: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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