Record link: 
http://hdl.handle.net/20.500.12708/209032
-
Title: 
Anchor Losses in MEMS Plate Resonators of Finite Width
-
Citation: 
Platz, D., Stixenberger, M., Loch Gesing, A., Ignat, I., Kähler, H., & Schmid, U. (2024, June). Anchor Losses in MEMS Plate Resonators of Finite Width [Conference Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/209032
-
Publication Type: 
Presentation - Conference Presentation
en
Language: 
English
-
Authors: 
Platz, Daniel 
Stixenberger, M. 
Loch Gesing, Andre 
Ignat, Ioan 
Kähler, Hendrik 
Schmid, Ulrich 
-
Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
-
Date (published): 
Jun-2024
-
Event name: 
MESS24 - Microelectronic Systems Symposium 
en
Event date: 
6-Jun-2024 - 7-Jun-2024
-
Event place: 
Wien, Austria
-
Keywords: 
Anchor Losses; MEMS; Plate Resonators
en
Research Areas: 
Modeling and Simulation: 100%
-
Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
-
Appears in Collections:
Presentation

Show full item record

Page view(s)

51
checked on Jan 21, 2025

Google ScholarTM

Check