Record link: 
http://hdl.handle.net/20.500.12708/210183
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Title: 
Modeling polycrystalline diamond MEMS resonators
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Citation: 
Gesing, A. L., Huber, D., Steinmüller-Neth, D., Pfusterschmied, G., Platz, D., & Schmid, U. (2024). Modeling polycrystalline diamond MEMS resonators. In 19th International Workshop on Nanomechanical Sensing (pp. 114–114).
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Publication Type: 
Inproceedings - Abstract Book Contribution
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Language: 
English
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Authors: 
Gesing, André L. 
Huber, Dominik 
Steinmüller-Neth, Doris 
Pfusterschmied, Georg 
Platz, Daniel 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
E056-15 - Fachbereich Resilient Embedded Systems 
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Published in: 
19th International Workshop on Nanomechanical Sensing 
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Date (published): 
25-Jun-2024
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Event name: 
19th International Workshop on Nanomechanical Sensing 
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Event date: 
24-Jun-2024 - 27-Jun-2024
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Event place: 
Vienna, Austria
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Number of Pages: 
1
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Keywords: 
MEMS resonators; polycrystalline diamond; modeling
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Research Areas: 
Modeling and Simulation: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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