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Year of Publication
Record link:
http://hdl.handle.net/20.500.12708/192875
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Title:
Impact of bandwidth and number of measurement points on Q-factor measurement precision in piezoelectric MEMS resonators
en
Citation:
Schneider, M., & Schmid, U. (2023). Impact of bandwidth and number of measurement points on Q-factor measurement precision in piezoelectric MEMS resonators. In
MikroSystemTechnik Kongress 2023
(pp. 681–685). VDE Verlag.
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Publication Type:
Inproceedings - Full-Paper Contribution
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Language:
English
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Authors:
Schneider, Michael
Schmid, Ulrich
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Organisational Unit:
E366-02 - Forschungsbereich Mikrosystemtechnik
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Published in:
MikroSystemTechnik Kongress 2023
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ISBN:
978-3-8007-6203-3
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Date (published):
Oct-2023
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Event name:
Mikrosystemtechnik-Kongress 2023
de
Event date:
23-Oct-2023 - 25-Oct-2023
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Event place:
Dresden, Germany
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Number of Pages:
5
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Publisher:
VDE Verlag, Berlin, Offenbach
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Keywords:
Q-factor
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Research Areas:
Sensor Systems: 100%
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Science Branch:
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper
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