Record link: 
http://hdl.handle.net/20.500.12708/226177
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Title: 
DC Voltage Induced Parametric Potential Energy Modulation in Bistable Piezoelectric MEMS Membranes
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Citation: 
Muringakodan, S., Schmid, U., & Schneider, M. (2025). DC Voltage Induced Parametric Potential Energy Modulation in Bistable Piezoelectric MEMS Membranes. In SMSI 2025 : Proceedings : Proof reading version (pp. 224–225). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/D6.3
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Publisher DOI: 
10.5162/SMSI2025/D6.3
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Publication Type: 
Inproceedings - Full-Paper Contribution
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Language: 
English
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Authors: 
Muringakodan, Shareena 
Schmid, Ulrich 
Schneider, Michael 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Published in: 
SMSI 2025 : Proceedings : Proof reading version 
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Date (published): 
May-2025
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Event name: 
SMSI 2025 - Sensor and Measurement Science International 
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Event date: 
6-May-2025 - 8-May-2025
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Event place: 
Nürnberg, Germany
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Number of Pages: 
2
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Publisher: 
AMA Verband für Sensorik und Messtechnik e.V.
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Keywords: 
Bistability; Piezo; Membranes; potential energy; parametric
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Abstract: 
This paper explores the potential energy modulation of bistable PiezoMEMS membranes via stress tuning. The static deflection of the membrane is tuned by applying DC voltage, while external air pressure enables load-deflection measurements for the potential energy analysis. The effect of DC on the membrane is closely related to the membrane's stress and its initial static buckling height. Membranes that are already buckled and exhibit bistability demonstrate minimal changes when subjected to DC. In contrast, membranes that are buckled but remain monostable exhibit a significant response to DC.
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Research Areas: 
Sensor Systems: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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