Platz, D., Loch Gesing, A., & Schmid, U. (2023). Fluid-Structure Interaction of MEMS Resonators. In SMSI 2023 Conference – Sensor and Measurement Science International (pp. 181–182). https://doi.org/10.5162/SMSI2023/C6.1
The modelling of the fluid-structure interaction of MEMS resonators with a surrounding fluid is a formidable challenge. Only for resonators with slender beam geometries reliable methods are available. Here, we present a novel modelling approach that overcomes the geometry restrictions of beam-based methods while still being computationally efficient. We use this method to study the spectral response of a MEMS resonator immersed in a liquid. The results give insights into the fluid-structure interaction of MEMS resonators that could not have been achieved with established methods.
