<div class="csl-bib-body">
<div class="csl-entry">Platz, D., Loch Gesing, A., & Schmid, U. (2023). Fluid-Structure Interaction of MEMS Resonators. In <i>SMSI 2023 Conference – Sensor and Measurement Science International</i> (pp. 181–182). https://doi.org/10.5162/SMSI2023/C6.1</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/193977
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dc.description.abstract
The modelling of the fluid-structure interaction of MEMS resonators with a surrounding fluid is a formidable challenge. Only for resonators with slender beam geometries reliable methods are available. Here, we present a novel modelling approach that overcomes the geometry restrictions of beam-based methods while still being computationally efficient. We use this method to study the spectral response of a MEMS resonator immersed in a liquid. The results give insights into the fluid-structure interaction of MEMS resonators that could not have been achieved with established methods.
en
dc.language.iso
en
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dc.subject
MEMS resonators
en
dc.subject
fluid sensors
en
dc.subject
fluid-structure interaction
en
dc.subject
plate models
en
dc.subject
finite element method
en
dc.subject
2D Navier-Stokes equations
en
dc.subject
Linear elasticity
en
dc.subject
Aeroacoustic analogies
en
dc.subject
Perfectly matched layer
en
dc.title
Fluid-Structure Interaction of MEMS Resonators
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.relation.isbn
978-3-9819376-8-8
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dc.description.startpage
181
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dc.description.endpage
182
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dc.type.category
Abstract Book Contribution
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tuw.booktitle
SMSI 2023 Conference – Sensor and Measurement Science International
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tuw.researchTopic.id
C6
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tuw.researchTopic.id
I8
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tuw.researchTopic.name
Modeling and Simulation
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tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
50
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tuw.researchTopic.value
50
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tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.5162/SMSI2023/C6.1
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dc.description.numberOfPages
2
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tuw.author.orcid
0000-0002-5923-0279
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tuw.event.name
Sensor and Measurement Science International (SMSI 2023)
en
tuw.event.startdate
08-05-2023
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tuw.event.enddate
11-05-2023
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Nürnberg
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tuw.event.country
DE
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tuw.event.presenter
Platz, Daniel
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tuw.event.track
Single Track
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.languageiso639-1
en
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item.openairetype
conference paper
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item.grantfulltext
restricted
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item.fulltext
no Fulltext
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item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_5794
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crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
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crisitem.author.orcid
0000-0002-5923-0279
-
crisitem.author.orcid
0000-0002-0970-3875
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crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
