Record link: 
http://hdl.handle.net/20.500.12708/210488
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Title: 
Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical Systems
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Citation: 
Ali, B., Muzammil, M., Bostan Shirin, M., Zarepakzad, S., Kerimzade, U., & Alaca, B. E. (2024). Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires  with Thick Microelectromechanical Systems. In A. Kocabaş & C. Kocabaş (Eds.), NANOTR-18 : Books of Abstracts (pp. 11–11). Koç University. http://hdl.handle.net/20.500.12708/210488
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Publication Type: 
Inproceedings - Abstract Book Contribution
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Language: 
English
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Authors: 
Ali, Basit 
Muzammil, Muhammad 
Bostan Shirin, Mehdi 
Zarepakzad, Sina 
Kerimzade, Umut 
Alaca, B. Erdem 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Published in: 
NANOTR-18 : Books of Abstracts 
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Date (published): 
Aug-2024
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Event name: 
NANOTR-18: 18th Nanoscience and Nanotechnology Conference 
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Event date: 
26-Aug-2024 - 28-Aug-2024
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Event place: 
Koç, Turkey
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Number of Pages: 
1
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Publisher: 
Koç University
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Peer reviewed: 
Yes
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Keywords: 
Technology Development; Monolithic Integration; Sub-micron Si Nanowires
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Research Areas: 
Materials Characterization: 50%
Sensor Systems: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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