DC Field
Value
Language
dc.contributor.author
Ali, Basit
-
dc.contributor.author
Muzammil, Muhammad
-
dc.contributor.author
Bostan Shirin, Mehdi
-
dc.contributor.author
Zarepakzad, Sina
-
dc.contributor.author
Kerimzade, Umut
-
dc.contributor.author
Alaca, B. Erdem
-
dc.contributor.editor
Kocabaş, Aşkın
-
dc.contributor.editor
Kocabaş, Coşkun
-
dc.date.accessioned
2025-02-03T08:00:43Z
-
dc.date.available
2025-02-03T08:00:43Z
-
dc.date.issued
2024-08
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Ali, B., Muzammil, M., Bostan Shirin, M., Zarepakzad, S., Kerimzade, U., &#38; Alaca, B. E. (2024). Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires  with Thick Microelectromechanical Systems. In A. Kocabaş &#38; C. Kocabaş (Eds.), <i>NANOTR-18 : Books of Abstracts</i> (pp. 11–11). Koç University. http://hdl.handle.net/20.500.12708/210488</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/210488
-
dc.language.iso
en
-
dc.subject
Technology Development
en
dc.subject
Monolithic Integration
en
dc.subject
Sub-micron Si Nanowires
en
dc.title
Technology Development for Monolithic Integration of Suspended Sub-micron Si Nanowires with Thick Microelectromechanical Systems
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.description.startpage
11
-
dc.description.endpage
11
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
NANOTR-18 : Books of Abstracts
-
tuw.peerreviewed
true
-
tuw.relation.publisher
Koç University
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
dc.description.numberOfPages
1
-
tuw.author.orcid
0009-0003-3649-2756
-
tuw.author.orcid
0000-0002-7029-4812
-
tuw.author.orcid
0000-0002-2712-1908
-
tuw.author.orcid
0000-0001-5931-8134
-
tuw.event.name
NANOTR-18: 18th Nanoscience and Nanotechnology Conference
en
tuw.event.startdate
26-08-2024
-
tuw.event.enddate
28-08-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Koç
-
tuw.event.country
TR
-
tuw.event.presenter
Ali, Basit
-
tuw.event.track
Single Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.fulltext
no Fulltext
-
item.openairetype
conference paper
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.grantfulltext
restricted
-
crisitem.author.dept
Koç University
-
crisitem.author.dept
Koç University
-
crisitem.author.dept
Koç University
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
Koç University
-
crisitem.author.dept
Koç University
-
crisitem.author.orcid
0009-0003-3649-2756
-
crisitem.author.orcid
0000-0002-7029-4812
-
crisitem.author.orcid
0000-0002-2712-1908
-
crisitem.author.orcid
0000-0001-5931-8134
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
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