Record link: 
http://hdl.handle.net/20.500.12708/192311
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Title: 
A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer
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Citation: 
Wahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2023, September 21). A Novel Approach for Thin 4H-SiC Foil Realization using Controlled Spalling from a 4H-SiC Wafer [Poster Presentation]. ICSCRM 2023 . International Conference on Silicon Carbide and Related Materials, Sorrento, Italy.
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Publication Type: 
Presentation - Poster Presentation
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Language: 
English
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Authors: 
Wahid, Shan 
Leitgeb, Markus 
Pfusterschmied, Georg 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
21-Sep-2023
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Event name: 
ICSCRM 2023 . International Conference on Silicon Carbide and Related Materials 
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Event date: 
17-Sep-2023 - 22-Sep-2023
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Event place: 
Sorrento, Italy
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Keywords: 
4H-SiC; realization
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foil
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Research Areas: 
Materials Characterization: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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