Schneider, M., Mortada, M., Mayrhofer, D., Kaltenbacher, M., & Schmid, U. (2024). Directivity and distance dependence of generated pressure field of bistable PMUTs. In Abstract Book Eurosensors XXXVI (pp. 307–308). https://doi.org/10.5162/EUROSENSORSXXXVI/PT4.193
This work presents both the directivity pattern and distance dependence of the pressure field of a piezoelectric micromachined ultrasonic transducer (PMUT). The PMUT comprises a silicon membrane and an integrated piezoelectric transducer based on aluminum nitride (AlN). It exploits bistability to achieve large membrane displacements during switching between both ground states.
