<div class="csl-bib-body">
<div class="csl-entry">Schneider, M., Mortada, M., Mayrhofer, D., Kaltenbacher, M., & Schmid, U. (2024). Directivity and distance dependence of generated pressure field of bistable PMUTs. In <i>Abstract Book Eurosensors XXXVI</i> (pp. 307–308). https://doi.org/10.5162/EUROSENSORSXXXVI/PT4.193</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/209843
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dc.description.abstract
This work presents both the directivity pattern and distance dependence of the pressure field of a piezoelectric micromachined ultrasonic transducer (PMUT). The PMUT comprises a silicon membrane and an integrated piezoelectric transducer based on aluminum nitride (AlN). It exploits bistability to achieve large membrane displacements during switching between both ground states.
en
dc.language.iso
en
-
dc.subject
PMUT
en
dc.subject
Bistability
en
dc.subject
PiezoMEMS
en
dc.subject
aluminum nitride
en
dc.subject
acoustic MEMS
en
dc.title
Directivity and distance dependence of generated pressure field of bistable PMUTs
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.relation.isbn
978-3-910600-03-4
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dc.description.startpage
307
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dc.description.endpage
308
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dc.type.category
Poster Contribution
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tuw.booktitle
Abstract Book Eurosensors XXXVI
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tuw.researchTopic.id
I8
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tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.5162/EUROSENSORSXXXVI/PT4.193
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dc.description.numberOfPages
2
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tuw.author.orcid
0000-0001-9846-7132
-
tuw.event.name
Eurosensors XXXVI
en
tuw.event.startdate
01-09-2024
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tuw.event.enddate
04-09-2024
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Debrecen
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tuw.event.country
HU
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tuw.event.presenter
Schneider, Michael
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.languageiso639-1
en
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item.openairetype
conference poster
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item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_6670
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E325-03 - Forschungsbereich Technische Akustik
-
crisitem.author.dept
E325-03 - Forschungsbereich Technische Akustik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E325 - Institut für Mechanik und Mechatronik
-
crisitem.author.parentorg
E325 - Institut für Mechanik und Mechatronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
