Record link: 
http://hdl.handle.net/20.500.12708/226174
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Title: 
Noise in Piezoelectric MEMS: Modeling and Experimental Characterization
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Citation: 
Zarepakzad, S., Egger, P., Rahnemaihaghighi, N., Muringakodan, S., Mortada, M., Das, P. T., Schwab, K., Schmid, U., & Schneider, M. (2025). Noise in Piezoelectric MEMS: Modeling and Experimental Characterization. In SMSI 2025 : Proceedings : Proof reading version (pp. 222–223). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/D6.2
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Publisher DOI: 
10.5162/SMSI2025/D6.2
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Publication Type: 
Inproceedings - Full-Paper Contribution
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Language: 
English
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Authors: 
Zarepakzad, Sina 
Egger, Patrick 
Rahnemaihaghighi, Negin 
Muringakodan, Shareena 
Mortada, Mahdi 
Das, Proloy Taran 
Schwab, Keith 
Schmid, Ulrich 
Schneider, Michael 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Published in: 
SMSI 2025 : Proceedings : Proof reading version 
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ISBN: 
978-3-910600-06-5
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Date (published): 
May-2025
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Event name: 
SMSI 2025 - Sensor and Measurement Science International 
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Event date: 
6-May-2025 - 8-May-2025
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Event place: 
Nürnberg, Germany
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Number of Pages: 
2
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Publisher: 
AMA Verband für Sensorik und Messtechnik e.V.
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Keywords: 
Piezoelectric MEMS; noise measurement; noise modeling; alumninium nitride; thin-film sensors
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Abstract: 
This study investigates noise mechanisms in piezoelectric MEMS membranes to identify and minimize performance limitations. A comprehensive noise model is developed, incorporating experimental measurements and the amplifier’s noise floor, validated through close agreement with measured noise spectra. The noise is decomposed into distinct sources, which are identified within the developed model. The findings provide valuable insights for optimizing MEMS membrane design, enhancing noise performance, and enabling high-precision applications in sensing and actuation.
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Research Areas: 
Sensor Systems: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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