DC Field
Value
Language
dc.contributor.author
Zarepakzad, Sina
-
dc.contributor.author
Egger, Patrick
-
dc.contributor.author
Rahnemaihaghighi, Negin
-
dc.contributor.author
Muringakodan, Shareena
-
dc.contributor.author
Mortada, Mahdi
-
dc.contributor.author
Das, Proloy Taran
-
dc.contributor.author
Schwab, Keith
-
dc.contributor.author
Schmid, Ulrich
-
dc.contributor.author
Schneider, Michael
-
dc.date.accessioned
2026-02-09T15:32:15Z
-
dc.date.available
2026-02-09T15:32:15Z
-
dc.date.issued
2025-05
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Zarepakzad, S., Egger, P., Rahnemaihaghighi, N., Muringakodan, S., Mortada, M., Das, P. T., Schwab, K., Schmid, U., &#38; Schneider, M. (2025). Noise in Piezoelectric MEMS: Modeling and Experimental Characterization. In <i>SMSI 2025 : Proceedings : Proof reading version</i> (pp. 222–223). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/D6.2</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/226174
-
dc.description.abstract
This study investigates noise mechanisms in piezoelectric MEMS membranes to identify and minimize performance limitations. A comprehensive noise model is developed, incorporating experimental measurements and the amplifier’s noise floor, validated through close agreement with measured noise spectra. The noise is decomposed into distinct sources, which are identified within the developed model. The findings provide valuable insights for optimizing MEMS membrane design, enhancing noise performance, and enabling high-precision applications in sensing and actuation.
en
dc.language.iso
en
-
dc.subject
Piezoelectric MEMS
en
dc.subject
noise measurement
en
dc.subject
noise modeling
en
dc.subject
alumninium nitride
en
dc.subject
thin-film sensors
en
dc.title
Noise in Piezoelectric MEMS: Modeling and Experimental Characterization
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
TU Wien, Austria
-
dc.contributor.affiliation
Applied Physics - California Institute of Technology (Pasadena, US)
-
dc.relation.isbn
978-3-910600-06-5
-
dc.description.startpage
222
-
dc.description.endpage
223
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
SMSI 2025 : Proceedings : Proof reading version
-
tuw.relation.publisher
AMA Verband für Sensorik und Messtechnik e.V.
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.publisher.doi
10.5162/SMSI2025/D6.2
-
dc.description.numberOfPages
2
-
tuw.author.orcid
0000-0002-7029-4812
-
tuw.author.orcid
0000-0001-8216-4815
-
tuw.author.orcid
0000-0001-9846-7132
-
tuw.event.name
SMSI 2025 - Sensor and Measurement Science International
en
tuw.event.startdate
06-05-2025
-
tuw.event.enddate
08-05-2025
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Nürnberg
-
tuw.event.country
DE
-
tuw.event.institution
AMA Verband für Sensorik und Messtechnik e.V.
-
tuw.event.presenter
Zarepakzad, Sina
-
tuw.event.track
Multi Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.fulltext
no Fulltext
-
item.languageiso639-1
en
-
item.grantfulltext
restricted
-
item.openairetype
conference paper
-
item.cerifentitytype
Publications
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
TU Wien, Austria
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
Applied Physics - California Institute of Technology (Pasadena, US)
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.orcid
0000-0002-7029-4812
-
crisitem.author.orcid
0000-0001-8216-4815
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
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