Loch Gesing, A., Gietl, E., Stixenberger, M., Platz, D., & Schmid, U. (2025). Avoided mode-crossing in MEMS resonators under different dissipation mechanisms. In SMSI 2025 : Proceedings : Proof reading version (pp. 83–84). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/B2.2
This study investigates the phenomenon of avoided-crossing in MEMS resonators and its impact on the quality factor (Q-factor) under two key dissipation mechanisms: anchor losses and fluid-structure interaction. Numerical and experimental results reveal significant reductions in Q-factors during mode crossings and avoided-crossings, particularly in scenarios involving width variations and fluid density changes. These findings highlight the need to consider avoided mode-crossing in MEMS resonators for obtaining high Q-factors and hence, high device sensitivity as well as predictable bandwidth.
