Record link: 
http://hdl.handle.net/20.500.12708/208519
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Title: 
Material Aspects and Unconventional Device Concepts for PiezoMEMS
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Citation: 
Schneider, M., & Schmid, U. (2024, June 7). Material Aspects and Unconventional Device Concepts for PiezoMEMS [Keynote Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208519
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Publication Type: 
Presentation - Keynote Presentation
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Language: 
English
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Authors: 
Schneider, Michael 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
7-Jun-2024
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Event name: 
MESS24 - Microelectronic Systems Symposium 
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Event date: 
6-Jun-2024 - 7-Jun-2024
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Event place: 
Wien, Austria
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Keywords: 
PiezoMEMS
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Research Areas: 
Sensor Systems: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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