Record link: 
http://hdl.handle.net/20.500.12708/193312
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Title: 
Essentials of Finite Element Simulations for MEMS
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Citation: 
Platz, D. (2023, May 8). Essentials of Finite Element Simulations for MEMS [Presentation]. Sensor and Measurement  Science International (SMSI 2023), Nürnberg, Germany.
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Publication Type: 
Presentation - Presentation
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Language: 
English
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Authors: 
Platz, Daniel 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
8-May-2023
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Event name: 
Sensor and Measurement Science International (SMSI 2023) 
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Event date: 
8-May-2023 - 11-May-2023
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Event place: 
Nürnberg, Germany
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Keywords: 
Finite Element Simulations; MEMS
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Additional information: 
Tutorial for Finite Element Simulations
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Research Areas: 
Modeling and Simulation: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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