Mortada, M., Schlögl, M., Schmid, U., & Schneider, M. (2025). Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration. In Proceedings EUROSENSORS 2025 (pp. 417–418). https://doi.org/10.5162/EUROSENSORS2025/TP33
In this work, snap-through modes shapes of bistable piezoelectric micro-electromechanical devicesare presented based on a prior investigation of its parametric behavior. These devices make use of compressivealuminium nitride thin film in order to achieve bistability, hence the ability of switching between two ground states.
