Record link: 
http://hdl.handle.net/20.500.12708/226182
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Title: 
Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration
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Citation: 
Mortada, M., Schlögl, M., Schmid, U., & Schneider, M. (2025). Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration. In Proceedings EUROSENSORS 2025 (pp. 417–418). https://doi.org/10.5162/EUROSENSORS2025/TP33
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Publisher DOI: 
10.5162/EUROSENSORS2025/TP33
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Publication Type: 
Inproceedings - Abstract Book Contribution
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Language: 
English
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Authors: 
Mortada, Mahdi 
Schlögl, Matthias 
Schmid, Ulrich 
Schneider, Michael 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Published in: 
Proceedings EUROSENSORS 2025 
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ISBN: 
978-3-910600-07-2
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Date (published): 
Sep-2025
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Event name: 
37th European Conference on Solid-State Transducers - EUROSENSORS 2025 
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Event date: 
7-Sep-2025 - 10-Sep-2025
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Event place: 
Wroclaw, Poland
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Number of Pages: 
2
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Peer reviewed: 
Yes
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Keywords: 
Snap-through; Resonance mode; PiezoMEMS; Bistability; Aluminium nitride
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Abstract: 
In this work, snap-through modes shapes of bistable piezoelectric micro-electromechanical devicesare presented based on a prior investigation of its parametric behavior. These devices make use of compressivealuminium nitride thin film in order to achieve bistability, hence the ability of switching between two ground states.
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Research Areas: 
Sensor Systems: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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