<div class="csl-bib-body">
<div class="csl-entry">Mortada, M., Schlögl, M., Schmid, U., & Schneider, M. (2025). Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration. In <i>Proceedings EUROSENSORS 2025</i> (pp. 417–418). https://doi.org/10.5162/EUROSENSORS2025/TP33</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/226182
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dc.description.abstract
In this work, snap-through modes shapes of bistable piezoelectric micro-electromechanical devicesare presented based on a prior investigation of its parametric behavior. These devices make use of compressivealuminium nitride thin film in order to achieve bistability, hence the ability of switching between two ground states.
en
dc.language.iso
en
-
dc.subject
Snap-through
en
dc.subject
Resonance mode
en
dc.subject
PiezoMEMS
en
dc.subject
Bistability
en
dc.subject
Aluminium nitride
en
dc.title
Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.relation.isbn
978-3-910600-07-2
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dc.description.startpage
417
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dc.description.endpage
418
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dc.type.category
Abstract Book Contribution
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tuw.booktitle
Proceedings EUROSENSORS 2025
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tuw.peerreviewed
true
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.5162/EUROSENSORS2025/TP33
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dc.description.numberOfPages
2
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tuw.author.orcid
0000-0001-9846-7132
-
tuw.event.name
37th European Conference on Solid-State Transducers - EUROSENSORS 2025
en
tuw.event.startdate
07-09-2025
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tuw.event.enddate
10-09-2025
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Wroclaw
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tuw.event.country
PL
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tuw.event.presenter
Mortada, Mahdi
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.languageiso639-1
en
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.fulltext
no Fulltext
-
item.grantfulltext
restricted
-
item.openairetype
conference paper
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.orcid
0000-0003-1226-6570
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
