DC Field
Value
Language
dc.contributor.author
Keerthi, Keerthi
-
dc.contributor.author
Schmid, Ulrich
-
dc.contributor.author
Schneider, Michael
-
dc.date.accessioned
2025-01-15T11:53:00Z
-
dc.date.available
2025-01-15T11:53:00Z
-
dc.date.issued
2024-09
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Keerthi, K., Schmid, U., &#38; Schneider, M. (2024, September). <i>IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM</i> [Conference Presentation]. MNE 2024 - 50th International Micro and Nano Engineering Conference, Montpellier, France. http://hdl.handle.net/20.500.12708/208778</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/208778
-
dc.language.iso
en
-
dc.subject
AlN
en
dc.subject
thin films
en
dc.subject
dual Ion beam
en
dc.subject
sputtered
en
dc.subject
impact
en
dc.subject
substrat tilt
en
dc.title
IMPACT OF SUBSTRATE TILT ON RESIDUAL STRESS AND ON PIEZOELECTRIC PROPERTIES OF DUAL ION BEAM SPUTTERED ALN THIN FILM
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.author.orcid
0000-0001-9846-7132
-
tuw.event.name
MNE 2024 - 50th International Micro and Nano Engineering Conference
en
tuw.event.startdate
16-09-2024
-
tuw.event.enddate
19-09-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Montpellier
-
tuw.event.country
FR
-
tuw.event.presenter
Keerthi, Keerthi
-
tuw.event.track
Single Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference paper not in proceedings
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cp
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
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