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| | Preview | Authors / Editors | Title | Type | Issue Date |
| 1 | | Schmid, Ulrich ; Hajian, Ali ; Bittner, Achim | Wet chemical Etching as an Effective Technique for the Local Permittivity Reduction of LTCC Substrates | Konferenzbeitrag Inproceedings | 2019 |
| 2 |  | Fischeneder, Martin ; Bittner, Achim ; Schneider, Michael ; Schmid, Ulrich | Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films | Article Artikel    | Jun-2018 |
| 3 | | Talai, Armin ; Kölpin, K. ; Bittner, Achim ; Steinhäußer, Frank ; Schmid, Ulrich ; Tillle, Thomas | Porösizierte Glaskeramik-Substrate für die Radarsensorik | Buchbeitrag Book Contribution | 2018 |
| 4 | | Iannacci, J. ; Serra, E. ; Sordo, G. ; Bonaldi, M. ; Borrielli, A. ; Schmid, U. ; Bittner, A. ; Schneider, M. ; Kuenzig, T. ; Schrag, G. ; Pandraud, G. ; Sarro, P. M. | MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing | Artikel Article | 2018 |
| 5 | | Wistrela, E. ; Schmied, I. ; Schneider, M. ; Gillinger, M. ; Mayrhofer, P.M. ; Bittner, A. ; Schmid, U. | Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1−x N thin films | Artikel Article | 2018 |
| 6 | | Fischeneder, M. ; Wistrela, E. ; Bittner, A. ; Schneider, M. ; Schmid, U. | Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures | Artikel Article | 2017 |
| 7 | | Mayrhofer, Patrick ; Rehlendt, Christopher ; Bittner, Achim ; Schneider, Michael ; Schmid, Ulrich | Scandium Aluminium Nitride for MEMS Applications | Konferenzbeitrag Inproceedings | 2016 |
| 8 | | Schneider, Michael ; Bittner, Achim ; Kucera, Martin ; Schmid, Ulrich ; Tille Thomas | Piezoelektrische MEMS Sensoren zur Viskositäts- und Dichtebestimmung von technischen Flüssigkeiten | Buchbeitrag Book Contribution | 2016 |
| 9 | | Mayrhofer, P. M. ; Persson, P. O. Å. ; Bittner, A. ; Schmid, U. | Properties of ScxAl1‑xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading | Artikel Article | 2016 |
| 10 | | Wang, W B ; Fu, Y Q ; Chen, J J ; Xuan, W P ; Chen, J K ; Wang, X Z ; Mayrhofer, P ; Duan, P F ; Bittner, A ; Schmid, U ; Luo, J K | AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance | Artikel Article | 2016 |
| 11 | | Mayrhofer, P.M. ; Wistrela, E. ; Schneider, M. ; Bittner, A. ; Schmid, U. | Precise Determination of d 33 and d 31 from Piezoelectric Deflection Measurements and 2D FEM Simulations Applied to Sc x Al 1-x N | Konferenzbeitrag Inproceedings | 2016 |
| 12 | | Pfusterschmied, Georg ; Kucera, Martin ; Toledo, Javier ; Steindl, W. ; Ruiz-Díez, V. ; Bittner, Achim ; Schneider, Michael ; Sànchez-Rojas, Jose Luis ; Schmid, Ulrich | Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators | Konferenzbeitrag Inproceedings | 2016 |
| 13 | | Schneider, Michael ; Bittner, Achim ; Schmid, Ulrich | Improved Piezoelectric Coefficients in Ultra-thin Aluminum Nitride Thin Films | Konferenzbeitrag Inproceedings | 2016 |
| 14 | | Mayrhofer, Patrick ; Rehlendt, Christopher ; Bittner, Achim ; Schmid, Ulrich | Scandium Aluminium Nitrid für MEMS Anwendungen---Poster | Konferenzbeitrag Inproceedings | 2016 |
| 15 | | Steinhäußer, Frank ; Talai, Armin ; Weigel, Robert ; Koelpin, Alexander ; Bittner, Achim ; Schmid, Ulrich | Permittivity Reduction and Surface Modification by Porosification of LTCC | Artikel Article | 2016 |
| 16 | | Steinhäußer, Frank ; Talai, Armin ; Sandulache, Gabriela ; Weigel, Robert ; Koelpin, Alexander ; Hansal, Wolfgang ; Bittner, Achim ; Schmid, Ulrich | Pulse plated silver metallization on porosified LTCC substrates for high frequency applications | Artikel Article | 2016 |
| 17 | | Pfusterschmied, Georg ; Kucera, Martin ; Steindl, W. ; Manzaneque, T. ; Ruiz-Díez, V. ; Bittner, Achim ; Schneider, Michael ; Sànchez-Rojas, Jose Luis ; Schmid, Ulrich | Roof tile-shaped modes in quasi free-free supported piezoelectricmicroplate resonators in high viscous fluids | Artikel Article | 2016 |
| 18 | | Dergez, D. ; Schneider, M. ; Bittner, A. ; Pawlak, N. ; Schmid, U. | Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films | Artikel Article | 2016 |
| 19 | | Backes, Andreas ; Bittner, Achim ; Leitgeb, Markus ; Schmid, Ulrich | Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon | Artikel Article | 2016 |
| 20 | | Backes, Andreas ; Leitgeb, Markus ; Bittner, Achim ; Schmid, Ulrich | Temperature Dependent Pore Formation in Metal Assisted Chemical Etching of Silicon | Artikel Article | 2016 |
