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Full name Familienname, Vorname
Zahel, Thomas
 
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Results 1-14 of 14 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Waid, Simon ; Wanzenböck, Heinz D. ; Hobler, Gerhard ; Zahel, Thomas ; Bertagnolli, Emmerich ; Mühlberger, Michael ; Schöftner, Rainer Topography Extraction Of 3d Structures Through Afm Of NanoimprintsKonferenzbeitrag Inproceedings2010
2Zahel, Thomas ; Hobler, Gerhard Kinetic Monte Carlo studies of Smart Cut technology in Si: Final reportBericht Report2009
3Zahel, Thomas ; Hobler, Gerhard IMSIL-kLMCBericht Report2009
4Zahel, Thomas Modelling defect formation and evolution during SOI wafer fabricationThesis Hochschulschrift2009
5Zahel, Thomas ; Hobler, Gerhard Kinetic Monte Carlo studies of Smart Cut technology in Si: The influence of He damage on defects generated by H and He co-implantationBericht Report2008
6Zahel, Thomas ; Hobler, Gerhard Kinetic Monte Carlo studies of Smart Cut technology in Si: Platelet model and influence of He damage on platelet formationBericht Report2008
7Zahel, Thomas ; Hobler, Gerhard ; Bourdelle, Konstantin K. Investigation of defect evolution during hydrogen implantation using kinetic Monte Carlo simulationsKonferenzbeitrag Inproceedings2008
8Hobler, Gerhard ; Zahel, Thomas Kinetic Monte Carlo studies of Smart Cut technology in SiBericht Report2007
9Moutanabbir, O ; Terreault, B ; Chicoine, M ; Simpson, J ; Zahel, Thomas ; Hobler, Gerhard Hydrogen/Deuterium-defect complexes involved in the ion cutting of Si (0 0 1) at the sub-100 nm scaleArtikel Article2006
10Moutanabbir, O ; Terreault, B ; Chicoinec, M ; Simpson, J ; Zahel, Thomas ; Hobler, Gerhard Hydrogen/Deuterium-defect complexes involved in the ion-cutting of Si(001) at the sub-100 nm scalePräsentation Presentation2005
11Zahel, Thomas ; Otto, Gustav ; Hobler, Gerhard Atomistic Simulation of Hydrogen Implantation for SOI Wafer ProductionKonferenzbeitrag Inproceedings2005
12Terreault, B ; Chicoine, M ; Desrosiers, N ; Giguere, A ; Hobler, Gerhard ; Moutanabbir, O ; Ross, G ; Schiettekatte, F ; Simpson, P ; Zahel, Thomas Isotope effects in low-energy ion-induced splittingKonferenzbeitrag Inproceedings2005
13Zahel, Thomas ; Otto, Gustav ; Hobler, Gerhard Atomistic simulation of the isotope effect on defect formation in H/D-implanted SiKonferenzbeitrag Inproceedings2005
14Zahel, Thomas Investigation of the isotope effect in hydrogen-induced blistering of silicon using kinetic Monte Carlo simulationThesis Hochschulschrift2004