Okorn-Schmidt, Harald F.

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Okorn-Schmidt, Harald F.
 

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PreviewAuthors / EditorsTitleTypeIssue Date
1Okorn-Schmidt, Harald F. ; Holsteyns, Frank ; Lippert, Alexander ; Mui, David ; Kawaguchi, Mark ; Lechner, Christiane ; Frommhold, Philipp E. ; Nowak, Till ; Reuter, Fabian ; Piqué, Miquel Banchs ; Cairós, Carlos ; Mettin, Robert Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process RequirementsArtikel Article2014
2Okorn-Schmidt, Harald F. ; Holsteyns, Frank ; Lippert, Alexander ; Mui, David ; Kawaguchi, Mark ; Lechner, Christiane ; Frommhold, Philipp E. ; Nowak, Till ; Mettin, Robert (Invited) Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process RequirementsKonferenzbeitrag Inproceedings2013