Name Card

Full name Familienname, Vorname
Efavi, J
 

Own Publications Eigene Publikationen

Results 1-3 of 3 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Abermann, Stephan ; Efavi, J ; Sjoblom, Gustaf ; Lemme, M ; Olsson, Jörgen ; Bertagnolli, Emmerich Processing and evaluation of metal gate/high-κ/Si capacitors incorporating Al, Ni, TiN, and Mo as metal gate, and ZrO₂ and HfO₂ as high-κ dielectricArtikel Article2007
2Abermann, Stephan ; Efavi, J ; Sjöblom, G ; Lemme, M ; Olsson, Jörgen ; Bertagnolli, Emmerich Impact of Al-, Ni-, TiN-, and Mo-mental gates on MOCVD-grown HfO₂ and ZrO₂high-κ dielectricsArtikel Article2007
3Abermann, Stephan ; Sjoblom, Gustaf ; Efavi, J ; Lemme, M ; Olsson, Jörgen ; Bertagnolli, Emmerich Comparative Study on the Impact of TiN and Mo Metal Gates on MOCVD-Grown HfO2 and ZrO2 High-κ Dielectrics for CMOS TechnologyKonferenzbeitrag Inproceedings2006