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Marchand, Günter

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		Preview	Author(s)	Title	Type	Issue Date
	1		Hernando, Jorge ; Sánchez-Rojas, Jose Luis ; Schmid, Ulrich ; Ababneh, Abdallah ; Marchand, Günter ; Seidel, Helmut	Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators	Artikel Article	2010
	2		Ababneh, A. ; Marchand, Günter ; Seidel, Helmut ; Hernando-Garcia, J. ; Sànchez-Rojas, Jose Luis ; Sökmen, Ü. ; Peiner, E. ; Schmid, Ulrich	Comparison Between AlN Thin Films with Different Crystal Orientation for MEMS Applications	Konferenzbeitrag Inproceedings	2009
	3		Catrin, Rodolphe ; Gachot, Carsten ; Marchand, Günter ; Schmid, Ulrich ; Mücklich, Frank	Selective wet chemical etching of metallic thin films designed by Laser Interference Metallurgy (LIMET)	Konferenzbeitrag Inproceedings	2009