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Nicolay, P.
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Gillinger, Manuel ; Schneider, Michael ; Bittner, Achim ; Nicolay, P. ; Schmid, Ulrich High temperature performance of sputter-deposited piezoelectric aluminum nitride thin filmsKonferenzbeitrag Inproceedings2015
2Gillinger, M. ; Schneider, M. ; Bittner, A. ; Nicolay, P. ; Schmid, U. Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin filmsArtikel Article2015