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Janschek, Klaus
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Janschek, Klaus
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Grahmann, Jan
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Schroedter, Richard
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close-loop trajectory control
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Control and Systems Engineering
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laser beam guidance
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permittivity
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quasi-static micro scanner
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silicone oil
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viscous passive damping
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2019
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Janschek, Klaus
Subject:
electrostatic staggered vertical comb drive
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Schroedter, Richard
; Grahmann, Jan
; Janschek, Klaus
Silicone Oil Damping for Quasi-static Micro Scanners with Electrostatic Staggered Vertical Comb Drives
Konferenzbeitrag
Inproceedings
2019
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Author
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Grahmann, Jan
1
Schroedter, Richard
Subject
1
close-loop trajectory control
1
Control and Systems Engineering
1
laser beam guidance
1
permittivity
1
quasi-static micro scanner
1
silicone oil
1
viscous passive damping
Date issued
1
2019
Close filters
Filter:
Author:
Janschek, Klaus
Subject:
electrostatic staggered vertical comb drive
Results 1-1 of 1 (Search time: 0.002 seconds).
RIS
EndNote
Bibtex
Excel
CSV
Send via email
Preview
Author(s)
Title
Type
Issue Date
1
Schroedter, Richard
; Grahmann, Jan
; Janschek, Klaus
Silicone Oil Damping for Quasi-static Micro Scanners with Electrostatic Staggered Vertical Comb Drives
Konferenzbeitrag
Inproceedings
2019
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