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Full name Familienname, Vorname
Kelty, S.P.
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Gennaro, S. ; Bersani, M. ; Kah, M. ; Kirkby, K.J. ; Doherty, R. ; Foad, M.A. ; Meirer, F. ; Streli, Christina ; Woicik, J.C. ; Pianetta, P. Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatmentArtikel Article 2010
2Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Kah, M. ; Kirkby, K.J. ; Meirer, F. ; Gennaro, S. ; Doherty, R. ; Foad, M.A. ; Woicik, J.C. ; Streli, Christina ; Bersani, M. ; Pianetta, P. Deactivation of sub-melt laser annealed arsenic ultra shallow junctions in silicon during subsequent thermal treatmentPräsentation Presentation2009
3Bersani, M. ; Pepponi, Giancarlo ; Giubertoni, D. ; Gennaro, S. ; Sahiner, M.A. ; Kelty, S.P. ; Kah, M. ; Kirkby, K.J. ; Doherty, R. ; Foad, M.A. ; Meirer, F. ; Streli, Christina ; Woicik, J.C. ; Pianetta, P. Characterization of Junction Activation and Deactivation Using non-Equilibrium Annealing: Solid Phase Epitaxy, Spike Annealing, Laser AnnealingPräsentation Presentation2009