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Leroy, W.P.
 

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PreviewAuthor(s)TitleTypeIssue Date
1Horkel, Maximilian ; Van Aeken, K. ; Eisenmenger-Sittner, Christoph ; Depla, D. ; Mahieu, S. ; Leroy, W.P. Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter depositionArtikel Article 5-Feb-2010
2Horkel, Maximilian ; Eisenmenger-Sittner, Christoph ; Quirchmair, M. ; VanAeken, K. ; Depla, D. ; Mahieu, S. ; Leroy, W.P. Determination of the nascent angular distribution of sputtered particles during reactive and non-reactive magnetron sputteringPräsentation Presentation2010