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Full name Familienname, Vorname
Trupke, Michael
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Aguinsky, Luiz Felipe ; Rodrigues, Frâncio ; Wachter, Georg ; Trupke, Michael ; Schmid, Ulrich ; Hössinger, Andreas ; Weinbub, Josef Phenomenological Modeling of Low-Bias Sulfur Hexafluoride Plasma Etching of SiliconArtikel Article 2022
2Aguinsky, Luiz Felipe ; Wachter, Georg ; Manstetten, Paul ; Rodrigues, Frâncio ; Trupke, Michael ; Schmid, Ulrich ; Hössinger, Andreas ; Weinbub, Josef Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity ResonatorsArtikel Article 2021