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Full name Familienname, Vorname
Muehlberger, Michael
 

Own Publications Eigene Publikationen

Results 1-6 of 6 (Search time: 0.005 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Muehlberger, Michael ; Ruttloff, Stephan ; Nees, Dieter ; Moharana, Amiya ; Belegratis, Maria R. ; Taus, Philipp ; Kopp, Sonja ; Wanzenboeck, Heinz D. ; Prinz, Adrian ; Fechtig, Daniel Nanoimprint Replication of Biomimetic, Multilevel Undercut NanostructuresArtikel Article 2021
2Taus, Philipp ; Prinz, Adrian ; Wanzenboeck, Heinz D. ; Schuller, Patrick ; Tsenov, Anton ; Schinnerl, Markus ; Shawrav, Mostafa M. ; Haslinger, Michael ; Muehlberger, Michael Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer StampsArtikel Article 2021
3Waid, Simon ; Wanzenboeck, Heinz D. ; Muehlberger, Michael ; Gavagnin, Marco ; Bertagnolli, Emmerich Focused ion beam direct patterning of hardmask layersArtikel Article 2014
4Waid, Simon ; Wanzenboeck, Heinz D ; Muehlberger, Michael ; Gavagnin, Marco ; Bertagnolli, Emmerich Generation of 3D nanopatterns with smooth surfacesArtikel Article 2014
5Waid, Simon ; Wanzenboeck, Heinz D. ; Gavagnin, Marco ; Langegger, Ruppert ; Muehlberger, Michael ; Bertagnolli, Emmerich Focused ion beam induced Ga-contamination-An obstacle for UV-nanoimprint stamp repair?Artikel Article 2013
6Waid, Simon ; Wanzenboeck, Heinz D. ; Muehlberger, Michael ; Bertagnolli, Emmerich Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabricationArtikel Article 2012