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Pawlak, N.
 

Own Publications Eigene Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Dergez, D. ; Schneider, M. ; Bittner, A. ; Pawlak, N. ; Schmid, U. Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin filmsArtikel Article 2016