DC Field
Value
Language
dc.contributor.editor
Jagannathan, H.
-
dc.contributor.editor
Martino, J.
-
dc.contributor.editor
Karim, Z.
-
dc.contributor.editor
Kakushima, K.
-
dc.contributor.editor
Timans, P.J.
-
dc.contributor.editor
Gousev, E.
-
dc.contributor.editor
De Gendt, S.
-
dc.contributor.editor
Misra, D.
-
dc.contributor.editor
Obeng, Y.
-
dc.contributor.editor
Roozeboom, F.
-
dc.contributor.editor
Nguyen, B.
-
dc.contributor.editor
Raskin, J.
-
dc.contributor.editor
Gamiz, F.
-
dc.contributor.editor
Selberherr, Siegfried
-
dc.contributor.editor
Simoen, E.
-
dc.contributor.editor
Ishii, H.
-
dc.date.accessioned
2023-12-30T11:02:04Z
-
dc.date.available
2023-12-30T11:02:04Z
-
dc.date.issued
2023-05-28
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Jagannathan, H., Martino, J., Karim, Z., Kakushima, K., Timans, P. J., Gousev, E., De Gendt, S., Misra, D., Obeng, Y., Roozeboom, F., Nguyen, B., Raskin, J., Gamiz, F., Selberherr, S., Simoen, E., &#38; Ishii, H. (Eds.). (2023). <i>Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 13 &#38; Advanced CMOS-Compatible Semiconductor Devices 20</i> (Vol. 111). ECS The Electrochemical Society.</div> </div>
-
dc.identifier.isbn
978-1-62332-686-9
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/190888
-
dc.language.iso
en
-
dc.publisher
ECS The Electrochemical Society
-
dc.subject
Silicon
en
dc.subject
CMOS
en
dc.title
Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 13 & Advanced CMOS-Compatible Semiconductor Devices 20
en
dc.type
Proceedings
en
dc.type
Tagungsband
de
dc.type.category
Full Paper Book
-
tuw.container.volume
111
-
tuw.peerreviewed
true
-
tuw.relation.ispartofseries
ECS Transactions
-
tuw.relation.publisher
The Electrochemical Society
-
tuw.relation.publisherplace
Pennington, USA
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.name
Nanoelectronics
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
dc.description.numberOfPages
307
-
tuw.editor.orcid
0000-0002-5583-6177
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference proceedings
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_f744
-
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