Physics and Technology of High-k Gate Dielectrics 6
Book title Buchtitel
Physics and Technology of High-k Gate Dielectrics 6
Publisher Herausgeber
ECS Transactions
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Abermann, Stephan ; Henkel, Christoph ; Bethge, Ole ; Bertagnolli, Emmerich | Atomic Layer Deposited Lanthanum-(Zirconate/Aluminate) Based High-K Dielectric Stacks For Future CMOS-Technology | Buchbeitrag Book Contribution | 2008 | |
| 2 | Henkel, Christoph ; Abermann, Stephan ; Bethge, Ole ; Reiche, Manfred ; Bertagnolli, Emmerich | Atomic Layer Deposition of High-k/Metal Gate Stack MOSFET-Devices on Strained-Silicon-on-Insulator Substrates | Buchbeitrag Book Contribution | 2008 |