Secondary Ion Mass Spectrometry

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Secondary Ion Mass Spectrometry
 

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Author:  Danninger, Herbert

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PreviewAuthor(s)TitleTypeIssue Date
1Larisegger, Silvia ; Holzlechner, Gerald ; Eitenberger, Elisabeth ; Rogalli, Michael ; Nelhiebel, Michael ; Schulze, Holger ; Kubicek, Markus ; Danninger, Herbert ; Hutter, Herbert ToF-SIMS Characterization of Passivation Systems for the Copper Metallization in Semiconductor DevicesKonferenzbeitrag Inproceedings2012