Procedia Engineering

Book title Buchtitel

Publisher Herausgeber

Procedia Engineering

Place of publishing Erscheinungsort

Vol. 120

Series Schriftenreihe

Procedia Engineering

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Subject: MEMS

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	Author(s)	Title	Type	Issue Date
1	Mayrhofer, P.M. ; Euchner, H. ; Bittner, A. ; Schmid, U.	Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN	Konferenzbeitrag Inproceedings	2014
2	Frischmuth, Tobias ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich	Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films	Konferenzbeitrag Inproceedings	2014
3	Mayrhofer, P.M. ; Wistrela, E. ; Schneider, M. ; Bittner, A. ; Schmid, U.	Precise Determination of d 33 and d 31 from Piezoelectric Deflection Measurements and 2D FEM Simulations Applied to Sc x Al 1-x N	Konferenzbeitrag Inproceedings	2016