Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 09)

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Publisher Verlag

IEEE

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		Preview	Author(s)	Title	Type	Issue Date
	1		Klein, S. ; Thilmont, S. ; Ziegler, Volker ; Prechtel, Ulrich ; Schmid, Ulrich ; Seidel, Helmut	High Temperature Stable Rf Mems Switch Based On Tungsten-Titanium	Konferenzbeitrag Inproceedings	2009
	2		Sànchez-Rojas, Jose Luis ; Hernando-Garcia, J. ; Donoso, A. ; Bellido, J. C. ; Gutiérrez, L. M. ; Ababneh, A. ; Seidel, Helmut ; Schmid, Ulrich	Piezoelectric Modal Sensors/actuators Based On Microplates Applying Surface Electrode Patterning	Konferenzbeitrag Inproceedings	2009