Proceedings of SPIE - Smart Sensors, Actuators, and MEMS VI

	Author(s)	Title	Type	Issue Date
1	Stifter, Michael ; Steiner, Harald ; Kainz, Andreas Franz Hubert ; Keplinger, Franz ; Hortschitz, Wilfried ; Sauter, Thilo	A Lorentz Force Actuated Magnetic Field Sensor with Capacitive Read-Out	Konferenzbeitrag Inproceedings	2013
2	Encke, Jörg ; Hortschitz, Wilfried ; Kainz, Andreas Franz Hubert ; Steiner, Harald ; Keplinger, Franz ; Sauter, Thilo	A Miniaturised Linear Shaker System for MEMS Sensor Characterisation	Konferenzbeitrag Inproceedings	2013
3	Hortschitz, Wilfried ; Kainz, Andreas Franz Hubert ; Encke, Jörg ; Kohl, Franz ; Steiner, Harald ; Stifter, Michael ; Sauter, Thilo ; Keplinger, Franz	Exploiting Infrared Transparency of Silicon for the Construction of Advanced MOEMS Vibration Sensors	Konferenzbeitrag Inproceedings	2013
4	Steiner, Harald ; Hortschitz, Wilfried ; Stifter, Michael ; Keplinger, Franz ; Sauter, Thilo	Highly Sensitive Thermal Actuators for Temperature Sensing	Konferenzbeitrag Inproceedings	2013
5	Hansal, W. ; Steiner, Harald ; Mann, R. ; Halmdienst, M. ; Schalko, Johannes ; Keplinger, Franz	Microgalvanic nickel pulse plating process for the production of thermal actuators	Konferenzbeitrag Inproceedings	2013