Hortschitz, W., Kainz, A. F. H., Encke, J., Kohl, F., Steiner, H., Stifter, M., Sauter, T., & Keplinger, F. (2013). Exploiting Infrared Transparency of Silicon for the Construction of Advanced MOEMS Vibration Sensors. In Proceedings of SPIE - Smart Sensors, Actuators, and MEMS VI (pp. 876319-1-876319–7). SPIE. http://hdl.handle.net/20.500.12708/73592