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Record link: 
http://hdl.handle.net/20.500.12708/73592
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Title: 
Exploiting Infrared Transparency of Silicon for the Construction of Advanced MOEMS Vibration Sensors
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Citation: 
Hortschitz, W., Kainz, A. F. H., Encke, J., Kohl, F., Steiner, H., Stifter, M., Sauter, T., & Keplinger, F. (2013). Exploiting Infrared Transparency of Silicon for the Construction of Advanced MOEMS Vibration Sensors. In Proceedings of SPIE - Smart Sensors, Actuators, and MEMS VI (pp. 876319-1-876319–7). SPIE. http://hdl.handle.net/20.500.12708/73592
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Publication Type: 
Inproceedings - Full-Paper Contribution
en
Authors: 
Hortschitz, Wilfried 
Kainz, Andreas Franz Hubert 
Encke, Jörg 
Kohl, Franz 
Steiner, Harald 
Stifter, Michael 
Sauter, Thilo 
Keplinger, Franz 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Published in: 
Proceedings of SPIE - Smart Sensors, Actuators, and MEMS VI 
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Date (published): 
2013
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Event name: 
Smart Sensors, Actuators, and MEMS VI - 2013 
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Event date: 
24-Apr-2013 - 26-Apr-2013
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Event place: 
Grenoble, France, EU
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Number of Pages: 
8
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Publisher: 
SPIE, 8763
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Peer reviewed: 
Yes
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Research Areas: 
Sensor Systems: 50%
Structure-Property Relationship: 25%
Special and Engineering Materials: 25%
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper

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