Semiconductors, Dielectrics, and Metals for Nanoelectronics 12
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Semiconductors, Dielectrics, and Metals for Nanoelectronics 12
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Bethge, Ole ; Zimmermann, Christina ; Lutzer, Bernhard ; Simsek, Sinan ; Abermann, Stephan ; Bertagnolli, Emmerich | ALD Grown Rare-Earth High-k Oxides on Ge: Lowering of the Interface Trap Density and EOT Scalability | Konferenzbeitrag Inproceedings | 2014 |